Etching of glass microchips with supercritical water
LAB ON A CHIP
Karasek, P; Grym, J; Roth, M; Planeta, J; Foret, F, 2015: Etching of glass microchips with supercritical water. LAB ON A CHIP 15(1), p. 311 - 318, doi: 10.1039/c4lc00843j
Research Groups: