Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

MATERIALS SCIENCE-POLAND

Stach, S; Dallaeva, D; Talu, S; Kaspar, P; Tomanek, P; Giovanzana, S; Grmela, L, 2015: Morphological features in aluminum nitride epilayers prepared by magnetron sputtering. MATERIALS SCIENCE-POLAND 33(1), p. 175 - 184, doi: 10.1515/msp-2015-0036

Research Groups:

• Advanced Instrumentation and Methods for Materials Characterization - Jozef Kaiser