Testing of Novel Device for Anodic Bonding process in MEMS Application

ELECTRONICS

PEKÁREK, J.; VRBA, R.; MAGÁT, M.; PAVLÍK, M.; HÁZE, J., 2011: Testing of Novel Device for Anodic Bonding process in MEMS Application. ELECTRONICS 86(4), p. 180 - 3; FULL TEXT

Research Groups:

• Smart Nanodevices - Vojtěch Adam

CEITEC authors:

• Prof. Radimír Vrba