Correlating structural and mechanical properties of AlN/TiN superlattice films

SCRIPTA MATERIALIA

KOUTNÁ, N.; ŘEHÁK, P.; CHEN, Z.; BARTOSIK, M.; FALLMANN, M.; ČERNÝ, M.; ZHANG, Z.; FRIÁK, M.; ŠOB, M.; MAYRHOFER, P.H.; HOLEC, D., 2019: Correlating structural and mechanical properties of AlN/TiN superlattice films. SCRIPTA MATERIALIA 165, p. 159 - 5, doi: 10.1016/j.scriptamat.2019.02.021; FULL TEXT

CEITEC authors:

• Miroslav Černý, Ph.D.
• Martin Friák, Ph.D.
• Petr Řehák, Ph.D.