Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films

Physica Status Solidi B

Vacek, P.; Kostelník, P.; Gröger, R., 2019: Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films. PHYSICA STATUS SOLIDI B 256(11), p. 1900279-1 - 1900279-7, doi: 10.1002/pssb.201900279
(LYRA, HELIOS, ICON-SPM)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660
• Scanning Probe Microscope Bruker Dimension Icon

Research Groups:

• CF: CEITEC Nano
• Multiscale Modelling and Measurements of Physical Properties - Roman Gröger

CEITEC authors:

• Roman Gröger, Ph.D.