Application of correlative AFM/SEM microscopy

Master´s Thesis

Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER´S THESIS , p. 1 - 64
(LYRA, LITESCOPE, MIRA, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
• LiteScope
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
• Electron beam evaporator BESTEC
• Wire bonder TPT HB 16

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures - Tomáš Šikola