A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Ni, S.; Zhu, HL.; Neuzil, P.; Yobas, L., 2020: A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 29(5), p. 1103 - 3, doi: 10.1109/JMEMS.2020.3008867; FULL TEXT

Research Groups:

• Smart Nanodevices - Vojtěch Adam

CEITEC authors:

• Prof. Pavel Neužil