Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS

Vacek, P; Kosteln?k, P; Gr?ger, R, 2019: Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS 256(11), doi: 10.1002/pssb.201900279

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