Aluminum Nitride with High d33 Piezoelectric Coefficient for MEMS Applications

PEKÁREK, J.; GABLECH, I.; KLEMPA, J.; SVATOŠ, V.; SCHNEIDER, M.; NEUŽIL, P., 2019: Aluminum Nitride with High d33 Piezoelectric Coefficient for MEMS Applications. , p. 1 - 4; FULL TEXT

Research Groups:

• Smart Nanodevices - Vojtěch Adam

CEITEC authors:

• Prof. Pavel Neužil