Investigation of structure of AlN thin films using Fourier-transform infrared spectroscopy

Procedia Structural Integrity

Dallaev Rashid, Mgr.;Papež Nikola, Ing.;Sobola Dinara, Mgr., Ph.D.;Ramazanov Shihgasan;Sedlák Petr, doc. Ing., Ph.D., 2020: Investigation of structure of AlN thin films using Fourier-transform infrared spectroscopy. PROCEDIA STRUCTURAL INTEGRITY , p. 601 - 6, doi: 10.1016/j.prostr.2020.01.152; FULL TEXT

CEITEC authors:

• Dinara Sobola, Ph.D.