Design and Fabrication of MEMS Low Power Heating Membrane

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; SLAVÍK, J.; CHOMOUCKÁ, J.; HUBÁLEK, J., 2012: Design and Fabrication of MEMS Low Power Heating Membrane. , p. 1 - 3; FULL TEXT

Research Groups:

• Smart Nanodevices - Vojtěch Adam

CEITEC authors:

• Jana Pekárková, Ph.D.
• Jaromír Hubálek, Ph.D.