The Nanolithography Toolbox

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

BALRAM, KC; WESTLY,DA; DAVANCO,M; GRUTTER,KE; LI,Q; MICHELS,T; RAY,CH; YU,LY; KASICA,RJ; WALLIN,CB; GILBERT,IJ; BRYCE,BA; SIMELGOR,G; TOPOLANCIK,J; LOBONTIU,N; LIU,YX; NEUZIL,P; SVATOS,V; DILL,KA; BERTRAND,NA; METZLER,MG; LOPEZ,G; CZAPLEWSKI,DA; OCOLA,L; SRINIVASAN,KA; STAVIS,SM; AKSYUK,VA; LIDDLE, JA; KRYLOV,S; ILIC, BR., 2016: The Nanolithography Toolbox. JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY , p. 464 - 11, doi: 10.6028/jres.121.024; FULL TEXT

Research Groups:

• Smart Nanodevices - Vojtěch Adam

CEITEC authors:

• Prof. Pavel Neužil