CEITEC BUT
4-probe station Cascade Microtech MPS 150 (MPS150)
CONTACT US
Guarantor:
Radim Hrdý, Ph.D.
Instrument status:
Operational, 25.6.2021 09:54
Equipment placement:
CEITEC Nano - C1.57
Research group:
CF: CEITEC Nano
Detailed description:
Probe station CASCADE MPS 150 is a modular probe station system which allows various configurations. System is designed for four-point electrical measurement in temperatures up to 300°C in combination with source measurement units. Machine allows wafer level device characterization I-V/C-V, RF, and another electrical testing.
Publications:
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Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
(ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER) -
Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER´S THESIS , p. 1 - 67
(WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, ICON-SPM, WIRE-BONDER) -
Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR´S THESIS , p. 1 - 50
(MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA) -
Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
(MIRA, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150) -
Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
(DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)