Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

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Guarantor: Tomáš Šamořil, Ph.D.
Technology / Methodology: Probe microscopy & Nanomanipulation
Instrument status: Operational Operational, 6.8.2021 11:20
Equipment placement: CEITEC Nano - C1.24
Research group: CF: CEITEC Nano


Detailed description:

SEM/FIB is a type of microscope where a focused electron/ion beam is scanned over the sample to generate an image of the surface or to modify it with nanometric resolution (usually better than 10 nm). The image is formed by detecting secondary and backscattered electrons emitted from the impact place of particle beam. The Gas Injection System (GIS) provides a gas inlet for gaseous precursors, thus allowing deposition and enhanced or selective etching on the sample surface using advanced surface chemistry. The microscope is equipped with two closed loop nanomanipulators (optionally two more can be installed), which allows measurement of 2-probe or 4-probe current-voltage characteristics. The tool is equipped with Electron Dispersive X-Ray spectroscopy analyser (EDX) for elemental analysis. Applications include positive/negative lithography, sample imaging and modification, electrical measurements and basic chemical and elemental analysis.


Publications:

  • REDONDO NEGRETE, E.; PUMERA, M., 2021: MXene-functionalised 3D-printed electrodes for electrochemical capacitors. ELECTROCHEMISTRY COMMUNICATIONS 124, p. 1 - 6, doi: 10.1016/j.elecom.2021.106920; FULL TEXT
    (LYRA, KRATOS-XPS, WITEC-RAMAN)
  • Vinogradov, A.; Heczko, M.; Mazánová, V.; Linderov, M.; Kruml, T., 2021: Kinetics of cyclically-induced mechanical twinning in γ-TiAl unveiled by a combination of acoustic emission, neutron diffraction and electron microscopy. ACTA MATERIALIA 212, doi: 10.1016/j.actamat.2021.116921; FULL TEXT
    (LYRA, TITAN)
  • Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS , p. 1 - 113
    (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
  • Muñoz, J.; Redondo, E.; Pumera, M., 2021: Bistable (Supra)molecular Switches on 3D-Printed Responsive Interfaces with Electrical Readout. ACS APPLIED MATERIALS & INTERFACES 13(11), p. 12649 - 12655, doi: 10.1021/acsami.0c14487; FULL TEXT
    (KRATOS-XPS, LYRA)
  • WANG, L.; GAO, W.; NG, S.; PUMERA, M., 2021: Chiral Protein-Covalent Organic Framework 3D-Printed Structures as Chiral Biosensors. ANALYTICAL CHEMISTRY 93(12), p. 5277 - 7, doi: 10.1021/acs.analchem.1c00322; FULL TEXT
    (VERIOS, KRATOS-XPS, LYRA)

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