Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)

Detailed description:

UHV sputter deposition system is equipped with two RFICP Kaufman ion-beam sources (KRI®) with 4 cm diameter grids (3-grid primary and 2-grid assisted/secondary) and charge neutralizer (LFN 2000 - KRI®). This setup is suitable for Ion-beam sputter deposition, Ion-beam assisted deposition, reactive sputter deposition with nitrogen and in-situ initial/continual substrate (pre-)cleaning. Etching (ion-milling) is not possible due to undesirable chamber and targets contamination.

Publications:

• Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
  (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
• GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; HRABINA, J.; HOLÁ, M.; KUNZ, J.; BRODSKÝ, J.; NEUŽIL, P., 2020: Simple and efficient AlN-based piezoelectric energy harvesters . MICROMACHINES 11(2), p. 1 - 10, doi: 10.3390/mi11020143; FULL TEXT
  (DRIE, RIE-CHLORINE, WIRE-BONDER, KAUFMAN)
• GABLECH, I.; SVATOŠ, V.; CAHA, O.; DUBROKA, A.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.; SCHNEIDER, M.; ŠIKOLA, T., 2019: Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup. THIN SOLID FILMS 670, p. 105 - 8, doi: 10.1016/j.tsf.2018.12.035; FULL TEXT
  (KAUFMAN, ICON-SPM, RIGAKU9, WOOLLAM-VIS)
• GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; KUNZ, J.; NEUŽIL, P., 2019: Aluminum nitride based piezoelectric harvesters. 2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS) (001), p. 1 - 4, doi: 10.1109/PowerMEMS49317.2019.82063211368; FULL TEXT
  (DIENER, DRIE, DWL, KAUFMAN, RIE-CHLORINE, SUSS-MA8)
• DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817; FULL TEXT
  (MIRA, EVAPORATOR, TITAN, KAUFMAN)

• GABLECH, I.; CAHA, O.; SVATOŠ, V.; PRÁŠEK, J.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T., 2018: Preparation of [001] Oriented Titanium Thin Film for MEMS Applications by Kaufman Ion-beam Source. 9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017) , p. 117 - 6; FULL TEXT
  (KAUFMAN, RIGAKU9)
• Bendova, M.; Kolar, J.; Marik, M.; Lednicky, T.; Mozalev, A., 2018: Influence of nitrogen species on the porous-alumina-assisted growth of TiO 2 nanocolumn arrays. ELECTROCHIMICA ACTA 281, p. 796 - 809, doi: 10.1016/j.electacta.2018.05.197
  (KAUFMAN, HELIOS, TITAN, RIGAKU9, KRATOS-XPS)
• CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 10, doi: 10.1039/c8nr01588k; FULL TEXT
  (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
• Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000
  (RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)
• GABLECH, I.; CAHA, O.; SVATOŠ, V.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T., 2017: Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source. THIN SOLID FILMS 638, p. 57 - 6, doi: 10.1016/j.tsf.2017.07.039; FULL TEXT
  (ICON-SPM, KAUFMAN, RIGAKU9)
• CHMELA, O.; SADÍLEK, J.; VALLEJOS VARGAS, S.; HUBÁLEK, J., 2017: Microelectrode array system as platforms for single nanowire based sensors . JOURNAL OF ELECTRICAL ENGINEERING 68(2), p. 158 - 5, doi: 10.1515/jee-2017-0023; FULL TEXT
  (DWL, KAUFMAN, MPS150, RIGAKU3)
• GABLECH, I.; SVATOŠ, V.; CAHA, O.; HRABOVSKÝ, M.; PRÁŠEK, J.; HUBÁLEK, J.; ŠIKOLA, T., 2016: Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide. JOURNAL OF MATERIALS SCIENCE 51(7), p. 3329 - 8, doi: 10.1007/s10853-015-9648-y; FULL TEXT
  (KAUFMAN, RIGAKU9, ICON-SPM)
• Gablech, I., 2016: CMOS compatible piezoelectric resonator with FET structure for graphene monolayer properties modulation. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (KAUFMAN, ICON-SPM, RIGAKU9)

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