Magnetron sputtering system BESTEC (MAGNETRON)

Profilová karta (PDF)

Detailed description:

The system consists of a sputter deposition chamber with 8 magnetrons in sputter up configuration. The lid flange of the sputtering chamber is sealed with double viton o- rings and differentially pumped.
For the chamber we use turbomolecular pumps with scroll foreline pump. For good end pressure a Ti- sublimation pump is also included. With the pumping configuration it is possible to reach the base pressure of 3x 10-9 mbar with bake out of the clean chamber. The gas inlet in the process chambers is realized with mass flow controllers. For sputter gas Ar we use a 50sccm range device and for O2 and N2 a 10sccm device is used. Pressure regulation is done by up stream process using a three stage valve over the turbo pump. The substrates max. 4” in diameter or several smaller substráte pieces can be mounted on different sample holders from molybdenum (totally 2 in the scope of supply).
There is a manually sample transfer foreseen into and out of the process chamber.
In the process chamber the sample can be heated to 850°C with radiation heating. The sample stage is thermal shielded and water cooled to prevent from heating up. The substrate can rotate motorized with max. 30 rpm.

Publications:

• Sepúlveda, M.; Kamnev, K.; Pytlicek, Z.; Prasek, J.; Mozalev, A., 2021: Superhydrophobic–Oleophobic Visible–Transparent Antireflective Nanostructured Anodic HfO2 Multifunctional Coatings for Potential Solar Panel Applications. ACS APPLIED NANO MATERIALS 4(2), p. 1754 - 1765, doi: 10.1021/acsanm.0c03202; FULL TEXT
  (MAGNETRON, RIE-FLUORINE, VERIOS, JAZ3-CHANNEL)
• Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER´S THESIS , p. 1 - 78; FULL TEXT
  (MAGNETRON, VERSALAB, MIRA, HELIOS, TITAN)
• Zadorozhnii, O., 2021: Exchange bias in metamagnetic heterostructures. MASTER´S THESIS , p. 1 - 81; FULL TEXT
  (MAGNETRON, VERSALAB, KERR-MICROSCOPE, RAITH, RIE-FLUORINE, LYRA, UHV-DEPOSITION, UHV-PREPARATION, UHV-XPS)
• Hnilica, J., 2021: Deposition of low-damping metamagnetic thin films. BACHELOR´S THESIS , p. 1 - 57; FULL TEXT
  (MAGNETRON, VERSALAB, VNA-MPI)
• Molnár, T., 2021: Magneto-optical imaging and analysis of magnetic domain microstructures. BACHELOR´S THESIS , p. 1 - 52; FULL TEXT
  (MAGNETRON, KERR-MICROSCOPE)

• Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS , p. 1 - 113
  (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
• LEDNICKÝ, T.; BONYÁR, A., 2020: Large Scale Fabrication of Ordered Gold Nanoparticle-Epoxy Surface Nanocomposites and Their Application as Label-Free Plasmonic DNA Biosensors. ACS APPL MATER INTER 12(4), p. 4804 - 11, doi: 10.1021/acsami.9b20907; FULL TEXT
  (MAGNETRON, RIE-FLUORINE, VERIOS, LYRA, HELIOS, KRATOS-XPS)
• UHLÍŘ, V.; PRESSACCO, F.; ARREGI URIBEETXEBARRIA, J.; PROCHÁZKA, P.; PRŮŠA, S.; POTOČEK, M.; ŠIKOLA, T.; ČECHAL, J.; BENDOUNAN, A.; SIROTTI, F., 2020: Single-layer graphene on epitaxial FeRh thin films. APPLIED SURFACE SCIENCE 514, p. 145923-1 - 7, doi: 10.1016/j.apsusc.2020.145923; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9, UHV-LEEM, UHV-LEIS, UHV-SPM, UHV-PREPARATION, UHV-XPS, SIMS)
• Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
  (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
• Mohelský, I., 2020: Infrared magneto–spectroscopy of Bi2Te3 topological insulator. MASTER´S THESIS , p. 1 - 49
  (FTIR, WOOLLAM-MIR, MAGNETRON, CRYOGENIC, KRATOS-XPS)
• Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
• ARREGI URIBEETXEBARRIA, J.; CAHA, O.; UHLÍŘ, V., 2020: Evolution of strain across the magnetostructural phase transition in epitaxial FeRh films on different substrates. PHYSICAL REVIEW B 101(17), p. 174413-1 - 14, doi: 10.1103/PhysRevB.101.174413; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9)
• Motyčková, L., 2020: Magnetic properties of self-assembled FeRh nanomagnets. MASTER´S THESIS , p. 1 - 90; FULL TEXT
  (MAGNETRON, VERSALAB, ICON-SPM, RIGAKU9, VERIOS, KERR-MICROSCOPE)
• Vojáček, L., 2019: Magneto-optical investigation of spintronic materials. BACHELOR´S THESIS , p. 1 - 51; FULL TEXT
  (MAGNETRON, VERSALAB)
• Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER´S THESIS , p. 1 - 55
  (MAGNETRON, MIRA, RAITH, ICON-SPM, CRYOGENIC, VERSALAB)
• Horák, M., 2019: Electron microscopy and spectroscopy in plasmonics. DOCTORAL THESIS , p. 1 - 129
  (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA, LYRA, ICON-SPM)
• HORÁK, M.; KŘÁPEK, V.; HRTOŇ, M.; KONEČNÁ, A.; LIGMAJER, F.; STÖGER-POLLACH, M.; ŠAMOŘIL, T.; PATÁK, A.; ÉDES, Z.; METELKA, O.; BABOCKÝ, J.; ŠIKOLA, T., 2019: Limits of Babinet’s principle for solid and hollow plasmonic antennas. SCIENTIFIC REPORTS 9, p. 1 - 11, doi: 10.1038/s41598-019-40500-1; FULL TEXT
  (FTIR, HELIOS, LYRA, MAGNETRON, SNOM-NANONICS, TITAN)
• Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: Homogeneity and penetration depth of atmospheric pressure plasma polymerization onto electrospun nanofibrous mats. APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148
  (LYRA, MAGNETRON, FTIR, KRATOS-XPS)
• Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
  (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA, RIE-FLUORINE, EVAPORATOR, VERSALAB)
• PRESSACCO, F.; UHLÍŘ, V.; GATTI, M.; NICOLAOU, A.; BENDOUNAN, A.; ARREGI URIBEETXEBARRIA, J.; PATEL, S.; FULLERTON, E.; KRIZMANCIC, D.; SIROTTI, F., 2018: Laser induced phase transition in epitaxial FeRh layers studied by pump-probe valence band photoemission. STRUCTURAL DYNAMICS 5(3), p. 034501-1 - 11, doi: 10.1063/1.5027809; FULL TEXT
  (MAGNETRON, RIGAKU9)
• BENDOVÁ, M.; KOLÁŘ, J.; GISPERT-GUIRADO, F.; MOZALEV, A., 2018: Porous-Alumina-Assisted Growth of Nanostructured Anodic Films on Ti-Nb Alloys. CHEMELECTROCHEM 5(19), p. 2825 - 11, doi: 10.1002/celc.201800785; FULL TEXT
  (MAGNETRON, RIGAKU9, TITAN, KRATOS-XPS)
• CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 10, doi: 10.1039/c8nr01588k; FULL TEXT
  (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
• NEUGEBAUER, P.; BLOOS, D.; MARX, R.; LUTZ, P.; KERN, M.; AGUILA, D.; VAVERKA, J.; LAGUTA, O.; DIETRICH, C.; CLÉRAC, R.; VAN SLAGEREN, J., 2018: Ultra-broadband EPR spectroscopy in field and frequency domains. PHYSICAL CHEMISTRY CHEMICAL PHYSICS 20(22), p. 15528 - 7, doi: 10.1039/c7cp07443c; FULL TEXT
  (MAGNETRON)
• Motyčková, L., 2018: Epitaxial growth and characterization of metamagnetic nanoparticles for biomedical applications. BACHELOR´S THESIS , p. 1 - 55
  (MAGNETRON, ICON-SPM, LYRA, CRYOGENIC)
• Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
  (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: Magnetization reversal and confinement effects across the metamagnetic phase transition in mesoscale FeRh structures. JOURNAL OF PHYSICS D - APPLIED PHYSICS 51(10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a; FULL TEXT
  (MIRA, LYRA, MAGNETRON)
• Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
  (MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 47
  (MAGNETRON, MIRA, RAITH, ICON-SPM, CRYOGENIC, LYRA)
• Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000
  (RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)
• Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
• MANAKHOV, A.; MICHLÍČEK, M.; NEČAS, D.; POLČÁK, J.; MAKHNEVA, E.; ELIÁŠ, M.; ZAJÍČKOVÁ, L., 2016: Carboxyl-rich coatings deposited by atmospheric plasma co-polymerization of maleic anhydride and acetylene. SURFACE AND COATINGS TECHNOLOGY 295, p. 37 - 9, doi: 10.1016/j.surfcoat.2015.11.039; FULL TEXT
  (FTIR, ICON-SPM, LYRA, MAGNETRON)

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