Mechanical profilometer Bruker Dektak XT (DEKTAK)

Profilová karta (PDF)

Detailed description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.

Publications:

• Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
• Mouralova, K.; Benes, L.; Zahradnicek, R.; Bednar, J.; Zadera, A.; Fries, J.; Kana, V., 2020: WEDM used for machining high entropy alloys. MATERIALS 13(21), p. 4823-1 - 4823-20, doi: 10.3390/ma13214823
  (LYRA, TEGRAMIN, DEKTAK, HELIOS, TITAN)
• Mouralova, K.; Bednar, J.; Benes, L.; Hrabec, P.; Kalivoda, M.; Fries, J., 2020: The analysis of EDM electrodes wear in corners and edges. ARCHIVES OF CIVIL AND MECHANICAL ENGINEERING 20(4), p. 130-1 - 130-14, doi: 10.1007/s43452-020-00137-8
  (LYRA, DEKTAK)
• Habovštiaková, M., 2020: Electroerosion wire cutting of technical ceramics. MASTER´S THESIS , p. 1 - 83
  (LYRA, DEKTAK)
• Kudrna, T., 2020: Electroerosive sinking of technical ceramics. MASTER´S THESIS , p. 1 - 88
  (LYRA, DEKTAK)

• Zubáková, A., 2020: Electroerosion machining of materials used in the aerospace industry. MASTER´S THESIS , p. 1 - 62
  (LYRA, DEKTAK)
• KAŠTYL, J.; CHLUP, Z.; ŠŤASTNÝ, P.; TRUNEC, M., 2020: Machinability and properties of zirconia ceramics prepared by gelcasting method. ADVANCES IN APPLIED CERAMICS 119(5-6), p. 252 - 9, doi: 10.1080/17436753.2019.1675402; FULL TEXT
  (DEKTAK, VERIOS)
• Líkař, M., 2020: Experimental electroerosion machining of special materials for aerospace industry. MASTER´S THESIS , p. 1 - 62
  (DEKTAK, LYRA)
• ŠŤASTNÝ, P.; CHLUP, Z.; TRUNEC, M., 2020: Gel-tape casting as a novel method for the production of flexible fine-grained alumina sheets. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 40(7), p. 2542 - 6, doi: 10.1016/j.jeurceramsoc.2019.10.042; FULL TEXT
  (VERIOS, DEKTAK)
• Macháčová, V., 2020: Analysis of results from experimental electrodischarge sinking of special materials for aerospace industry. MATER´S THESIS , p. 1 - 64
  (DEKTAK, LYRA, TEGRAMIN)
• Mouralova, K.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2020: Precision Machining of Nimonic C 263 Super AlloyUsing WEDM. COATINGS, MDPI 10(6), p. 590-1 - 590-20, doi: 10.3390/coatings10060590
  (LYRA, TEGRAMIN, TITAN, DEKTAK, HELIOS)
• KEJÍK, L.; HORÁK, M.; ŠIKOLA, T.; KŘÁPEK, V., 2020: Structural and optical properties of monocrystalline and polycrystalline gold plasmonic nanorods. OPTICS EXPRESS 28(23), p. 34960 - 13, doi: 10.1364/OE.409428; FULL TEXT
  (HELIOS, TITAN, LEICACOAT-STAN, ICON-SPM, DEKTAK)
• Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
  (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
• Kunc, J.; Rejhon, M.; Dědič, V.; Bábor, P., 2019: Thickness of sublimation grown SiC layers measured by scanning Raman spectroscopy. JOURNAL OF ALLOYS AND COMPOUNDS 789, p. 607 - 612, doi: 10.1016/j.jallcom.2019.02.305
  (DEKTAK, SIMS)
• Richter, V., 2019: Utilization of reduction plasma for surface treatments of nanostructured materials. MASTER´S THESIS , p. 1 - 52
  (DEKTAK, KRATOS-XPS)
• ŠIK, O.; ŠKVARENINA, Ľ.; CAHA, O.; MORAVEC, P.; ŠKARVADA, P.; BELAS, E.; GRMELA, L., 2018: Determining the sub-surface damage of CdTe single crystals after lapping. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 29(11), p. 9652 - 10, doi: 10.1007/s10854-018-9002-7; FULL TEXT
  (RIGAKU9, HELIOS, DEKTAK)
• Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
  (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• MANAKHOV, A.; LANDOVÁ, M.; MEDALOVÁ, J.; MICHLÍČEK, M.; POLČÁK, J.; NEČAS, D.; ZAJÍČKOVÁ, L., 2017: Cyclopropylamine plasma polymers for increased cell adhesion and growth. PLASMA PROCESSES AND POLYMERS 14(7), p. e1600123-1 - 12, doi: 10.1002/ppap.201600123; FULL TEXT
  (LYRA, ICON-SPM, DEKTAK)
• Knotek, M., 2015: Selective growth of GaN nanostructures on silicon substrates. MASTER´S THESIS , p. 1 - 68
  (DEKTAK, LYRA, ICON-SPM, TERS)
• Manakhov, A; Zajickova, L; Elias, M; Cechal, J; Polcak, J; Hnilica, J; Bittnerova, S; Necas, D, 2014: Optimization of Cyclopropylamine Plasma Polymerization toward Enhanced Layer Stability in Contact with Water. PLASMA PROCESSES AND POLYMERS 11(6), p. 532 - 544, doi: 10.1002/ppap.201300177
  (LYRA, FTIR, DEKTAK)

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