Fabrication and Characterisation of Nanostructures - Tomáš Šikola
CEITEC BUT CEITEC BUT
Fabrication and Characterisation of Nanostructures - Tomáš Šikola

Mechanical profilometer Bruker Dektak XT (DEKTAK)

CONTACT US

Guarantor: Meena Dhankhar, Ph.D.
Technology / Methodology: Nanolitography infrastructure
Instrument status: Operational Operational, 14.4.2021 13:27
Equipment placement: CEITEC Nano - C1.30
Research group: CF: CEITEC Nano


Detailed description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.


Publications:

  • Zubáková, A., 2020: Electroerosion machining of materials used in the aerospace industry. MASTER´S THESIS , p. 1 - 62
    (LYRA, DEKTAK)
  • KAŠTYL, J.; CHLUP, Z.; ŠŤASTNÝ, P.; TRUNEC, M., 2020: Machinability and properties of zirconia ceramics prepared by gelcasting method. ADVANCES IN APPLIED CERAMICS 119(5-6), p. 252 - 9, doi: 10.1080/17436753.2019.1675402; FULL TEXT
    (DEKTAK, VERIOS)
  • Líkař, M., 2020: Experimental electroerosion machining of special materials for aerospace industry. MASTER´S THESIS , p. 1 - 62
    (DEKTAK, LYRA)
  • ŠŤASTNÝ, P.; CHLUP, Z.; TRUNEC, M., 2020: Gel-tape casting as a novel method for the production of flexible fine-grained alumina sheets. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 40(7), p. 2542 - 6, doi: 10.1016/j.jeurceramsoc.2019.10.042; FULL TEXT
    (VERIOS, DEKTAK)
  • Macháčová, V., 2020: Analysis of results from experimental electrodischarge sinking of special materials for aerospace industry. MATER´S THESIS , p. 1 - 64
    (DEKTAK, LYRA, TEGRAMIN)

Show more publications...