Ellipsometric and reflectometric characterization of thin films exhibiting thickness non-uniformity and boundary roughness

APPLIED SURFACE SCIENCE

Ohlidal, I; Franta, D; Necas, D, 2017: Ellipsometric and reflectometric characterization of thin films exhibiting thickness non-uniformity and boundary roughness. APPLIED SURFACE SCIENCE 421, p. 687 - 696, doi: 10.1016/j.apsusc.2016.10.186

Research Groups:

• Development of Methods for Analysis and Measuring - Petr Klapetek

CEITEC authors:

• David Nečas, Ph.D.