Optical characterization of HfO2 thin films

THIN SOLID FILMS

Franta, D; Ohlidal, I; Necas, D; Vizda, F; Caha, O; Hason, M; Pokorny, P, 2011: Optical characterization of HfO2 thin films. THIN SOLID FILMS 519(18), p. 6085 - 6091, doi: 10.1016/j.tsf.2011.03.128

Research Groups:

• Multiscale Modelling and Measurements of Physical Properties - Roman Gröger
• Development of Methods for Analysis and Measuring - Petr Klapetek

CEITEC authors:

• David Nečas, Ph.D.
• Pavel Pokorný, Ph.D.