Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films

OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V

Ohlidal, M; Ohlidal, I; Necas, D; Vodak, J; Franta, D; Nadasky, P; Vizda, F, 2015: Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films. OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V 9628, doi: 10.1117/12.2191052

Research Groups:

• Development of Methods for Analysis and Measuring - Petr Klapetek

CEITEC authors:

• David Nečas, Ph.D.