Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry

OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V

Necas, D; Ohlidal, I; Vodak, J; Ohlidal, M; Franta, D, 2015: Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry. OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V 9628, doi: 10.1117/12.2190091

Research Groups:

• Development of Methods for Analysis and Measuring - Petr Klapetek

CEITEC authors:

• David Nečas, Ph.D.