Gecko mimicking surfaces

Master´s Thesis

Fecko, P., 2019: Gecko mimicking surfaces. MASTER´S THESIS , p. 1 - 52
(SUSS-RCD8, SUSS-MA8, DWL, DRIE, LYRA, ALD, RIE-FLUORINE, ICON-SPM, PARYLENE, XEF2)

Equipment:

• Resist coating and development system SÜSS MicroTec RCD8
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
• Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
• Scanning Probe Microscope Bruker Dimension Icon
• SCS Parylene Deposition System
• XeF2 Etching of Silicon

Research Groups:

• CF: CEITEC Nano
• Smart Nanodevices - Vojtěch Adam

CEITEC authors:

• Peter Fecko