Microfabricated ferromagnetic-shape-memory Heuslers: The geometry and size effects
Applied Materials Today
Takhsha Ghahfarokhi, M.; Arregi, J. A.; Casoli, F.; Horký, M.; Cabassi, R.; Uhlíř, V.; Albertini, F., 2021: Microfabricated ferromagnetic-shape-memory Heuslers: The geometry and size effects. APPLIED MATERIALS TODAY 23, doi: 10.1016/j.apmt.2021.101058; FULL TEXT
(VERSALAB, RIGAKU9, KERR-MICROSCOPE, SUSS-MA8, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, VERIOS)
Equipment:
- Cryogenic-free VSM and ETO measurement system – Quantum Design, VersaLab
- X-ray diffractometer with high brightness source Rigaku SmartLab 9kW
- Magneto-optical Kerr microscope
- Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3
- RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
- Electron beam evaporator BESTEC
- Wire bonder TPT HB 16
- High resolution Scanning Electron Microscope FEI Verios 460L
Research Groups:
CEITEC authors: