Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA)

Profilová karta (PDF)

Detailed description:

SEM is a type of microscope where a focused beam of electrons is scanned over the sample to generate an image or to modify the sample surface in nanometric resolution (usually better than 10 nm). The sample image is generated by detecting secondary and backscattered electrons emitted from the impact location of the beam. The tool is preferred for e-beam lithography, where the resist-coated sample is selectively exposed to the electron beam, allowing the preparation of very small patterns (< 50 nm and less) in the resistant surface. There can be further processing of the sample by wet chemistry (development, stripping). An interferometric stage can also be used to achieve ultimate resolution of electron beam lithography over a large area and to join more fields together.

Publications:

• Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER´S THESIS , p. 1 - 78; FULL TEXT
  (MAGNETRON, VERSALAB, MIRA, HELIOS, TITAN)
• KEPIČ, P.; LIGMAJER, F.; HRTOŇ, M.; REN, H.; MENEZES, L.; MAIER, S.; ŠIKOLA, T., 2021: Optically Tunable Mie Resonance VO2 Nanoantennas for Metasurfaces in the Visible. ACS PHOTONICS 8(4), p. 1048 - 10, doi: 10.1021/acsphotonics.1c00222; FULL TEXT
  (EVAPORATOR, MIRA, WITEC-RAMAN, WOOLLAM-VIS)
• Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS , p. 1 - 113
  (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
• USSIA, M.; URSO, M.; DOLEŽELÍKOVÁ, K.; MICHÁLKOVÁ, H.; ADAM, V.; PUMERA, M., 2021: Active Light-powered antibiofilm ZnO micromotors with chemically programmable properties. ADVANCED FUNCTIONAL MATERIALS 31(27), p. 1 - 10, doi: 10.1002/adfm.202101178; FULL TEXT
  (MIRA, RIGAKU9, KRATOS-XPS)
• KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T., 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9(3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326; FULL TEXT
  (HELIOS, MIRA, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)

• Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117(2), p. 022405-1 - 5, doi: 10.1063/5.0013692; FULL TEXT
  (EVAPORATOR, KERR-MICROSCOPE, ICON-SPM, LYRA, BRILLOUIN, MIRA)
• Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
• LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326; FULL TEXT
  (EVAPORATOR, LYRA, RIE-FLUORINE, MIRA, ICON-SPM)
• Babocký, J., 2020: Fabrication and characterization of nanostructures with functional properties in the field of plasmonics. PH.D. THESIS , p. 1 - 104; FULL TEXT
  (MIRA, RAITH, EVAPORATOR, SNOM-NANONICS, ICON-SPM)
• Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
  (MIRA, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
• Horák, M., 2019: Electron microscopy and spectroscopy in plasmonics. DOCTORAL THESIS , p. 1 - 129
  (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA, LYRA, ICON-SPM)
• Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER´S THESIS , p. 1 - 55
  (MAGNETRON, MIRA, RAITH, ICON-SPM, CRYOGENIC, VERSALAB)
• Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
  (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA, RIE-FLUORINE, EVAPORATOR, VERSALAB)
• Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER´S THESIS , p. 1 - 64
  (LYRA, LITESCOPE, MIRA, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER)
• ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: Magnetization reversal and confinement effects across the metamagnetic phase transition in mesoscale FeRh structures. JOURNAL OF PHYSICS D - APPLIED PHYSICS 51(10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a; FULL TEXT
  (MIRA, LYRA, MAGNETRON)
• DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817; FULL TEXT
  (MIRA, EVAPORATOR, TITAN, KAUFMAN)
• Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER´S THESIS , p. 1 - 83
  (LYRA, HELIOS, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER, KERR-MICROSCOPE)
• Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS , p. 1 - 45
  (MIRA, EVAPORATOR, FTIR)
• HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1; FULL TEXT
  (TITAN, HELIOS, MIRA, EVAPORATOR, ICON-SPM)
• Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
  (ALD, DIENER, EVAPORATOR, MIRA, PECVD, TERS, WIRE-BONDER)
• PROCHÁZKA, P.; MAREČEK, D.; LIŠKOVÁ, Z.; ČECHAL, J.; ŠIKOLA, T., 2017: X-ray induced electrostatic graphene doping via defect charging in gate dielectric. SCIENTIFIC REPORTS 7, p. 1 - 7, doi: 10.1038/s41598-017-00673-z; FULL TEXT
  (MIRA, DIENER, ALD, WIRE-BONDER)
• BABOCKÝ, J.; KŘÍŽOVÁ, A.; ŠTRBKOVÁ, L.; KEJÍK, L.; LIGMAJER, F.; HRTOŇ, M.; DVOŘÁK, P.; TÝČ, M.; ČOLLÁKOVÁ, J.; KŘÁPEK, V.; KALOUSEK, R.; CHMELÍK, R.; ŠIKOLA, T., 2017: Quantitative 3D phase imaging of plasmonic metasurfaces. ACS PHOTONICS 4(6), p. 1389 - 9, doi: 10.1021/acsphotonics.7b00022; FULL TEXT
  (MIRA, LYRA, EVAPORATOR)
• Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
  (MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• Holobrádek, J., 2017: Transport Properties of One Magnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 48
  (TITAN, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER, CRYOGENIC)
• Citterberg, D., 2017: Preparation of contacts to one-dimensional nanostructurs. BACHELOR´S THESIS , p. 1 - 26
  (DWL, MIRA, WIRE-BONDER, EVAPORATOR)
• Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 47
  (MAGNETRON, MIRA, RAITH, ICON-SPM, CRYOGENIC, LYRA)
• Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• BABOCKÝ, J.; DVOŘÁK, P.; LIGMAJER, F.; HRTOŇ, M.; ŠIKOLA, T.; BOK, J.; FIALA, J., 2016: Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34(6), p. 06K801-1 - 4, doi: 10.1116/1.4966959; FULL TEXT
  (MIRA)
• Musálek, T., 2016: Semiconductor nanowire growth utilizing alloyed catalyst. MASTER’S THESIS , p. 1 - 52
  (UHV-MBE, VERIOS, LYRA, MIRA, ALD)
• Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
• Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
  (LYRA, MIRA, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD)
• Břínek, L., 2015: Application of Plasmon Polaritons in Nanophotonics. PH.D. THESIS , p. 1 - 75
  (FTIR, LYRA, MIRA, TERS)
• URBÁNEK, M.; UHLÍŘ, V.; LAMBERT, C.; KAN, J.; EIBAGI, N.; VAŇATKA, M.; FLAJŠMAN, L.; KALOUSEK, R.; IM, M.; FISCHER, P.; ŠIKOLA, T.; FULLERTON, E., 2015: Dynamics and efficiency of magnetic vortex circulation reversal. PHYSICAL REVIEW B 91(9), p. 094415-1 - 11, doi: 10.1103/PhysRevB.91.094415; FULL TEXT
  (MIRA, LYRA, WIRE-BONDER)

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