Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
CONTACT US
Guarantor:
Vojtěch Švarc
Technology / Methodology:
Nanolitography infrastructure
Instrument status:
Operational, 24.5.2018 13:52, Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer
Equipment placement:
CEITEC Nano - C1.30
Research group:
CF: CEITEC Nano
Detailed description:
Multilayers characterization, resist thickness measurement mainly. Interval of measure film thickness from 10 nm up to 100 um.
Publications:
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Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
(ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER) -
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
(PECVD, MIRA, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR) -
Kvapil, M., 2015: Plasmonic Antennas. PH.D. THESIS , p. 1 - 104
(FTIR, NANOCALC, LYRA, TERS, DIENER) -
Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
(LYRA, MIRA, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD)