Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

MEASUREMENT SCIENCE AND TECHNOLOGY

Vodak, J; Necas, D; Ohlidal, M; Ohlidal, I, 2017: Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution. MEASUREMENT SCIENCE AND TECHNOLOGY 28(2), doi: 10.1088/1361-6501/aa5534

Research Groups:

• Development of Methods for Analysis and Measuring - Petr Klapetek

CEITEC authors:

• David Nečas, Ph.D.