Integration of nanostuctures into functional devices

Master´s Thesis

Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
(MIRA, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)

Equipment:

• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
• Electron beam evaporator BESTEC
• Witec Alpha 300R
• Wire bonder TPT HB 16
• High Resolution (Scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed
• 4-probe station Cascade Microtech MPS 150

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures - Tomáš Šikola

CEITEC authors:

• Daniel Citterberg