Fabrication of graphene and study of its physical properties

Ph.D. Thesis

Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
(ALD, DIENER, EVAPORATOR, MIRA, PECVD, TERS, WIRE-BONDER)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
• Resist stripper Diener electronic NANO Plasma cleaner
• Electron beam evaporator BESTEC
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
• Plasma Enhanced CVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100
• Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II
• Wire bonder TPT HB 16

Research Groups:

• CF: CEITEC Nano
• Molecular Nanostructures at Surfaces - Jan Čechal

CEITEC authors:

• Pavel Procházka, Ph.D.