Dielectric metasurfaces as modern optical components

Master´s thesis

Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
(MAGNETRON, DEKTAK, KRATOS-XPS, MIRA, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)

Equipment:

• Magnetron sputtering system BESTEC
• Mechanical profilometer Bruker Dektak XT
• X-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
• Electron beam evaporator BESTEC
• High resolution Scanning Electron Microscope FEI Verios 460L
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures - Tomáš Šikola

CEITEC authors:

• Katarína Rovenská