Progress toward the development of single nanowire-based arrays for gas sensing applications

Ph.D Thesis

Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
(ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
• Ion-Beam Sputter Deposition System BESTEC
• Resist stripper Diener electronic NANO Plasma cleaner
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3
• Resist coating and development system SÜSS MicroTec RCD8
• E-beam writer RAITH150 Two
• Magnetron sputtering system BESTEC
• Electron beam evaporator BESTEC
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
• Ion beam etching Scia Systems Coat 200
• Mechanical profilometer Bruker Dektak XT
• Scanning Probe Microscope Bruker Dimension Icon
• Spectroscopic reflectometer Ocean Optics NanoCalc 2000
• 4-probe station Cascade Microtech MPS 150
• Wire bonder TPT HB 16

Research Groups:

• CF: CEITEC Nano
• Smart Nanodevices - Vojtěch Adam

CEITEC authors:

• Ondřej Chmela, Ph.D.